ASTM F1845-08
(Test Method)Standard Test Method for Trace Metallic Impurities in Electronic Grade Aluminum-Copper, Aluminum-Silicon, and Aluminum-Copper-Silicon Alloys by High-Mass-Resolution Glow Discharge Mass Spectrometer
Standard Test Method for Trace Metallic Impurities in Electronic Grade Aluminum-Copper, Aluminum-Silicon, and Aluminum-Copper-Silicon Alloys by High-Mass-Resolution Glow Discharge Mass Spectrometer
SIGNIFICANCE AND USE
This test method is intended for application in the semiconductor industry for evaluating the purity of materials (for example, sputtering targets, evaporation sources) used in thin film metallization processes. This test method may be useful in additional applications, not envisioned by the responsible technical committee, as agreed upon between the parties concerned.
This test method is intended for use by GDMS analysts in various laboratories for unifying the protocol and parameters for determining trace impurities in aluminum-copper, aluminum-silicon, and aluminum-copper-silicon alloys. The objective is to improve laboratory-to-laboratory agreement of analysis data. This test method is also directed to the users of GDMS analyses as an aid to understanding the determination method, and the significance and reliability of reported GDMS data.
For most metallic species the detection limit for routine analysis is on the order of 0.01 wt. ppm. With special precautions, detection limits to sub-ppb levels are possible.
This test method may be used as a referee method for producers and users of electronic-grade aluminum-copper, aluminum-silicon and aluminum-copper-silicon materials.
SCOPE
1.1 This test method determines the concentrations of trace metallic impurities in high purity (99.99 wt. % pure, or purer, with respect to metallic trace impurities) aluminum-copper, aluminum-silicon and aluminum-copper-silicon alloys with major alloy constituents as follows:
aluminumGreater than 95.0 % copperLess or equal than 5.0 % siliconLess or equal than 5.0 %
1.2 This test method pertains to analysis by magnetic-sector glow discharge mass spectrometer (GDMS).
1.3 This test method does not include all the information needed to complete GDMS analyses. Sophisticated computer-controlled laboratory equipment, skillfully used by an experienced operator, is required to achieve the required sensitivity. This test method does cover the particular factors (for example, specimen preparation, setting of relative sensitivity factors, determination of detection limits, etc.) known by the responsible technical committee to effect the reliability of high purity aluminum analyses.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
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Designation: F1845 − 08
StandardTest Method for
Trace Metallic Impurities in Electronic Grade Aluminum-
Copper, Aluminum-Silicon, and Aluminum-Copper-Silicon
Alloys by High-Mass-Resolution Glow Discharge Mass
1
Spectrometer
This standard is issued under the fixed designation F1845; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope Metals, Ores, and Related Materials
E1593 GuideforAssessingtheEfficacyofAirCareProducts
1.1 This test method determines the concentrations of trace
in Reducing Sensorly Perceived Indoor Air Malodor
metallic impurities in high purity (99.99 wt. % pure, or purer,
Intensity
with respect to metallic trace impurities) aluminum-copper,
aluminum-silicon and aluminum-copper-silicon alloys with
3. Terminology
major alloy constituents as follows:
3.1 Terminology in this test method is consistent with
aluminum Greater than 95.0 %
copper Less or equal than 5.0 %
Terminology E135. Required terminology specific to this test
silicon Less or equal than 5.0 %
method, not covered in Terminology E135, is indicated in 3.2.
1.2 This test method pertains to analysis by magnetic-sector
3.2 Definitions:
glow discharge mass spectrometer (GDMS).
3.2.1 campaign—a test procedure to determine the accuracy
1.3 This test method does not include all the information
of the instrument, which was normally performed at the
needed to complete GDMS analyses. Sophisticated computer-
beginning of the day or after the instrument modification, or
controlled laboratory equipment, skillfully used by an experi-
both.
enced operator, is required to achieve the required sensitivity.
3.2.2 reference sample—material accepted as suitable for
Thistestmethoddoescovertheparticularfactors(forexample,
use as a calibration/sensitivity reference standard by all parties
specimen preparation, setting of relative sensitivity factors,
concerned with the analyses.
determination of detection limits, etc.) known by the respon-
3.2.3 specimen—a suitably sized piece cut from a reference
sible technical committee to effect the reliability of high purity
or test sample, prepared for installation in the GDMS ion
aluminum analyses.
source, and analyzed.
1.4 This standard does not purport to address all of the
3.2.4 test sample—material(aluminumalloy)tobeanalyzed
safety concerns, if any, associated with its use. It is the
for trace metallic impurities by this GDMS method.
responsibility of the user of this standard to establish appro-
3.2.4.1 Discussion—Generally the test sample is extracted
priate safety and health practices and determine the applica-
from a larger batch (lot, casting) of product and is intended to
bility of regulatory limitations prior to use.
be representative of the batch.
2. Referenced Documents
4. Summary of Test Method
2
2.1 ASTM Standards:
4.1 A specimen is mounted in a plasma discharge cell.
E135 Terminology Relating to Analytical Chemistry for
Atoms subsequently sputtered from the specimen surface are
ionized, and then focused as an ion beam through a double-
focusing magnetic-sector mass separation apparatus. The mass
1
This test method is under the jurisdiction of ASTM Committee F01 on
spectrum (the ion current) is collected as magnetic field or
Electronics and is the direct responsibility of Subcommittee F01.17 on Sputter
Metallization.
acceleration voltage, (or both) is scanned.
Current edition approved June 15, 2008. Published July 2008. Originally
4.2 The ion current of an isotope at mass M is the total
approved in 1997. Last previous edition approved in 2002 as F1845 – 97(02). DOI:
i
10.1520/F1845-08.
measured current, less contributions from all other interfering
2
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
sources. Portions of the measured current may originate from
contact ASTM Customer Service at service@astm.org. For Annual Book of ASTM
the ion detector alone (detector noise). Portions may be due to
Standards volume information, refer to the standard’s Document Summary page on
the ASTM website. incompletelymassresolvedionsofanisotopeormoleculewith
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States
1
---------------------- Page: 1 ----------------------
F1845 − 08
mass close to, but not identical with, M. In all such instances 5.4 This test method may be used as a referee method for
i
the interfering contributions must be estimated and subtracted producers and users of electronic-grade aluminum-copper,
from the measured signal. aluminum-silicon and aluminum-copper-silicon materials.
4.2.1 If the source of
...
This document is not anASTM standard and is intended only to provide the user of anASTM standard an indication of what changes have been made to the previous version. Because
it may not be technically possible to adequately depict all changes accurately, ASTM recommends that users consult prior editions as appropriate. In all cases only the current version
of the standard as published by ASTM is to be considered the official document.
Designation:F1845–97 (Reapproved 2002) Designation:F1845–08
Standard Test Method for
Trace Metallic Impurities in Electronic Grade Aluminum-
Copper, Aluminum-Silicon, and Aluminum-Copper-Silicon
Alloys by High-Mass-Resolution Glow Discharge Mass
1
Spectrometer
This standard is issued under the fixed designation F 1845; the number immediately following the designation indicates the year of
original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A
superscript epsilon (´) indicates an editorial change since the last revision or reapproval.
1. Scope
1.1 This test method determines the concentrations of trace metallic impurities in high purity (99.99 wt. % pure, or purer, with
respect to metallic trace impurities) aluminum-copper, aluminum-silicon and aluminum-copper-silicon alloys with major alloy
constituents as follows:
aluminum Greater than 95.0 %
copper Less or equal than 5.0 %
silicon Less or equal than 5.0 %
1.2 This test method pertains to analysis by magnetic-sector glow discharge mass spectrometer (GDMS).
1.3 This test method does not include all the information needed to complete GDMS analyses. Sophisticated computer-
controlledlaboratoryequipment,skillfullyusedbyanexperiencedoperator,isrequiredtoachievetherequiredsensitivity.Thistest
method does cover the particular factors (for example, specimen preparation, setting of relative sensitivity factors, determination
of detection limits, etc.) known by the responsible technical committee to effect the reliability of high purity aluminum analyses.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility
of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory
limitations prior to use.
2. Referenced Documents
2
2.1 ASTM Standards:
E 135 Terminology Relating to Analytical Chemistry for Metals, Ores, and Related Materials
E180Practice for Determining the Precision ofASTM Methods forAnalysis and Testing of Industrial and Specialty Chemicals
2
E673Terminology Relating to Surface Analysis
E876Practice for Use of Statistics in the Evaluation of Spectrometric Data
FE 1593Test Method for Trace Metallic Impurities in Electronic Grade Aluminum by High-Mass-Resolution Glow Discharge
Mass Spectrometer
5
F1594Specification for Pure Aluminum (Unalloyed) Source Material for Vacuum Coating Applications Guide for Assessing
the Efficacy of Air Care Products in Reducing Sensorly Perceived Indoor Air Malodor Intensity
3. Terminology
3.1 Terminology in this test method is consistent with Terminology E 135. Required terminology specific to this test method,
not covered in Terminology E 135, is indicated in 3.2.
3.2 Definitions:
3.2.1 campaign—a test procedure to determine the accuracy of the instrument, which was normally performed at the beginning
of the day or after the instrument modification, or both.
3.2.2 reference sample—material accepted as suitable for use as a calibration/sensitivity reference standard by all parties
concerned with the analyses.
3.2.3 specimen—a suitably sized piece cut from a reference or test sample, prepared for installation in the GDMS ion source,
and analyzed.
1
This test method is under the jurisdiction of ASTM Committee F01 on Electronics and is the direct responsibility of Subcommittee F01.17 on Sputter Metallization .
Current edition approved Dec. 10, 2002. Published May 2003. Originally approved in 1997. Last previous edition approved in 1997 as F1845–97.
Current edition approved June 15, 2008. Published July 2008. Originally approved in 1997. Last previous edition approved in 2002 as F 1845 – 97(02).
2
For referencedASTM standards, visit theASTM website, www.astm.org, or contactASTM Customer Service at service@astm.org. For Annual Book of ASTM Standards
, Vol 03.05.volume information, refer to the standard’s Document Summary page on the ASTM website.
Copyright © ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959, United States.
1
---------------------- Page: 1 ----------------------
F1845–08
3.2.4 test sample—material (aluminum alloy) to be analyzed for trace metallic impurities by this GDMS method.
3.2.4.1 Discussion—Generally the test sample is extracted from a larger batch (lot, casting) of product and is intended to be
representative of the batch.
4. Summary of Test Method
4.1 A specimen is mounted in a plasma discharge cell. Atoms subsequently s
...
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