oSIST prEN ISO 14644-15:2026

SLOVENSKI STANDARD
01-januar-2026
Čiste sobe in podobna nadzorovana okolja - 15. del: Ocena ustreznosti uporabe
opreme in materialov na osnovi koncentracije onesnaževal v zraku (ISO/FDIS
14644-15:2025)
Cleanrooms and associated controlled environments - Part 15: Assessment of suitability
for use of equipment and materials by airborne chemical concentration (ISO/FDIS 14644
-15:2025)
Reinräume und zugehörige Reinraumbereiche - Teil 15: Bewertung der
Reinraumtauglichkeit von Ausrüstungsgegenständen und Materialien anhand der
chemischen Luft- und Oberflächenkonzentration (ISO/FDIS 14644-15:2025)
Salles propres et environnements maîtrisés apparentés - Partie 15: Évaluation de
l'aptitude à l'emploi des équipements et des matériaux par la détermination de la
concentration chimique aéroportée (ISO/FDIS 14644-15:2025)
Ta slovenski standard je istoveten z: prEN ISO 14644-15
ICS:
13.040.35 Brezprašni prostori in Cleanrooms and associated
povezana nadzorovana controlled environments
okolja
2003-01.Slovenski inštitut za standardizacijo. Razmnoževanje celote ali delov tega standarda ni dovoljeno.

FINAL DRAFT
International
Standard
ISO/FDIS 14644-15
ISO/TC 209
Cleanrooms and associated
Secretariat: ANSI
controlled environments —
Voting begins on:
Part 15:
2025-11-14
Assessment of suitability for use
Voting terminates on:
of equipment and materials by
2026-02-06
airborne chemical concentration
Salles propres et environnements maîtrisés apparentés —
Partie 15: Évaluation de l'aptitude à l'emploi des équipements et
des matériaux par la détermination de la concentration chimique
aéroportée
RECIPIENTS OF THIS DRAFT ARE INVITED TO SUBMIT,
WITH THEIR COMMENTS, NOTIFICATION OF ANY
RELEVANT PATENT RIGHTS OF WHICH THEY ARE AWARE
AND TO PROVIDE SUPPOR TING DOCUMENTATION.
IN ADDITION TO THEIR EVALUATION AS
BEING ACCEPTABLE FOR INDUSTRIAL, TECHNO-
ISO/CEN PARALLEL PROCESSING LOGICAL, COMMERCIAL AND USER PURPOSES, DRAFT
INTERNATIONAL STANDARDS MAY ON OCCASION HAVE
TO BE CONSIDERED IN THE LIGHT OF THEIR POTENTIAL
TO BECOME STAN DARDS TO WHICH REFERENCE MAY BE
MADE IN NATIONAL REGULATIONS.
Reference number
ISO/FDIS 14644-15:2025(en) © ISO 2025

FINAL DRAFT
ISO/FDIS 14644-15:2025(en)
International
Standard
ISO/FDIS 14644-15
ISO/TC 209
Cleanrooms and associated
Secretariat: ANSI
controlled environments —
Voting begins on:
Part 15:
Assessment of suitability for use
Voting terminates on:
of equipment and materials by
airborne chemical concentration
Salles propres et environnements maîtrisés apparentés —
Partie 15: Évaluation de l'aptitude à l'emploi des équipements et
des matériaux par la détermination de la concentration chimique
aéroportée
RECIPIENTS OF THIS DRAFT ARE INVITED TO SUBMIT,
WITH THEIR COMMENTS, NOTIFICATION OF ANY
RELEVANT PATENT RIGHTS OF WHICH THEY ARE AWARE
AND TO PROVIDE SUPPOR TING DOCUMENTATION.
© ISO 2025
IN ADDITION TO THEIR EVALUATION AS
All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may
BEING ACCEPTABLE FOR INDUSTRIAL, TECHNO-
ISO/CEN PARALLEL PROCESSING
LOGICAL, COMMERCIAL AND USER PURPOSES, DRAFT
be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on
INTERNATIONAL STANDARDS MAY ON OCCASION HAVE
the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below
TO BE CONSIDERED IN THE LIGHT OF THEIR POTENTIAL
or ISO’s member body in the country of the requester.
TO BECOME STAN DARDS TO WHICH REFERENCE MAY BE
MADE IN NATIONAL REGULATIONS.
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Published in Switzerland Reference number
ISO/FDIS 14644-15:2025(en) © ISO 2025

ii
ISO/FDIS 14644-15:2025(en)
Contents Page
Foreword .iv
Introduction .v
1 Scope . 1
2 Normative references . 1
3 Terms and definitions . 1
4 Symbols . 4
5 Test setup . 4
5.1 General .4
5.2 Closed design .5
5.3 Closed design special application .6
5.4 Open design .7
6 Representative mode . 7
6.1 Equipment .7
6.2 Material .7
7 Visual inspection . 8
7.1 General .8
7.2 Equipment .8
7.3 Material .8
8 Test description . 9
9 Calculation of the measured concentrations . 9
10 Calculation of specific emission rate . 10
10.1 Calculation of specific emission rate — Closed design.10
10.2 Calculation of specific emission rate — Open design .10
11 Assessment . .11
11.1 General .11
11.2 Required input data .11
11.3 Calculation to determine the effect on a cleanroom or controlled zone . 12
11.4 Assessment of the suitability of material(s) or equipment for an existing cleanroom or
controlled zone . 12
12 Documentation .12
12.1 General . 12
12.2 Common documentation requirements . 13
12.3 Test documentation . . 13
12.4 Visual inspection . 13
12.4.1 Equipment . 13
12.4.2 Materials . 13
Annex A (informative) Example calculation for suitability assessment of one equipment
(existing installation) . 14
Annex B (informative) Example calculation for suitability assessment of wall material (existing
cleanroom/clean zone installation) .16
Annex C (informative) Suitability assessment of a combination of equipment and floor material
in a cleanroom to be designed . 17
Bibliography . 19

iii
ISO/FDIS 14644-15:2025(en)
Foreword
ISO (the International Organization for Standardization) is a worldwide federation of national standards
bodies (ISO member bodies). The work of preparing International Standards is normally carried out through
ISO technical committees. Each member body interested in a subject for which a technical committee
has been established has the right to be represented on that committee. International organizations,
governmental and non-governmental, in liaison with ISO, also take part in the work. ISO collaborates closely
with the International Electrotechnical Commission (IEC) on all matters of electrotechnical standardization.
The procedures used to develop this document and those intended for its further maintenance are described
in the ISO/IEC Directives, Part 1. In particular, the different approval criteria needed for the different types
of ISO document should be noted. This document was drafted in accordance with the editorial rules of the
ISO/IEC Directives, Part 2 (see www.iso.org/directives).
ISO draws attention to the possibility that the implementation of this document may involve the use of (a)
patent(s). ISO takes no position concerning the evidence, validity or applicability of any claimed patent
rights in respect thereof. As of the date of publication of this document, ISO had not received notice of (a)
patent(s) which may be required to implement this document. However, implementers are cautioned that
this may not represent the latest information, which may be obtained from the patent database available at
www.iso.org/patents. ISO shall not be held responsible for identifying any or all such patent rig
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